Method for forming a nitride layer using preheated ammonia.,申请号EP19920114200-传众专利搜索

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发明名称	Method for forming a nitride layer using preheated ammonia.
摘要
申请公布号	EP0535354(B1)	申请公布日期	1995.11.08
申请号	EP19920114200	申请日期	1992.08.20
申请人	MOTOROLA, INC.	发明人	FILIPIAK, STANLEY M.
分类号	C23C8/24;H01L21/285;H01L21/318;H01L21/321;H01L21/768;(IPC1-7):H01L21/285;C23C16/34	主分类号	C23C8/24
代理机构		代理人
主权项
地址

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