| 摘要 |
PURPOSE:To provide a polishing device capable of suppressing the deformation of a block holding a polished body and polishing the polished body into high flatness. CONSTITUTION:This polishing device is provided with a sensor 24 detecting the displacement in the thickness direction of a block 34 holding a polished body 5, motors 22 having motor main spindles serving as ball screw shafts 22a screwed to the block 34 to displace it in the thickness direction, and a control means 21 controlling the motors 22 based on the detected value of the sensor 24 so that the block 34 is made flat. The sensor 24 is provided at one place of a nearly disk-like base 23 supported near the outer periphery of the upper face of the block 34 for detecting the center section of the block 34, and the motors 22 are provided at multiple symmetrical positions of the block 34. |
