| 摘要 |
PURPOSE:To provide a polishing device surely preventing a polishing liquid from being infiltrated to the suction side of a polished body and capable of being used as it is for the polished body of a different size. CONSTITUTION:A chuck means 21 is provided with suction grooves 38, 40 on the end face on the side for sucking and holding a polished body 5 and pressing grooves 37, 39 formed at the positions corresponding to the vicinity of the outer periphery end section of the polished body 5 and applied with the pressing pressure by air. The polished body 5 sucked and held by the chuck means 21 via a block 24 formed with multiple through holes in the thickness direction is pressed to the surface plate 7 and relatively slid for polishing while a polishing liquid is fed. The pressing grooves 37, 39 are concentrically provided at multiple places corresponding to the vicinity of the outer periphery end sections of multiple polished bodies 5 of different sizes. |
