PRODUCTION OF LAMINATED CERAMICS THIN FILM

摘要

PURPOSE:To obtain a high strength laminated ceramics thin film free from warpage by laminating sheet like ceramics raw moldings so as to be brought into contact with each surface low in powder packing ratio in the direction of thickness and burning. CONSTITUTION:The desired thin film is obtained by laminating the sheet like ceramics raw moldings so as to be brought into contact with each surface low in powder packing ratio in the direction of thickness and burning. Any of the sheet like raw molding only having different powder packing ratio in the direction of thickness can be used. In this case, the moldings 0.2-0.8vol.% in the difference of powder packing ratio are usually used. It is not preferable to exceed 0.8vol.% because the molding is sometimes not formed. On the other hand, it is also not preferable to be <=0.2vol.% because residual compressive stress is decreased and strength is not improved.