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发明名称
Schaltungsanordnung fuer Plasmareaktoren
摘要
申请公布号
DD295061(B5)
申请公布日期
1995.11.02
申请号
DD19900341380
申请日期
1990.04.11
申请人
DEHOFF, ARNULF, DR.-ING.;MATTKE, WOLFGANG, DR.-ING.
发明人
DEHOFF, ARNULF, DR.-ING.;MATTKE, WOLFGANG, DR.-ING.
分类号
H01L21/3065;H03H7/46;H05H1/46;(IPC1-7):H03H7/46;H01L21/306
主分类号
H01L21/3065
代理机构
代理人
主权项
地址
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