PLASMA DEVICE FOR SEMICONDUCTOR ELEMENT,申请号JP19940079094-传众专利搜索

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发明名称	PLASMA DEVICE FOR SEMICONDUCTOR ELEMENT
摘要
申请公布号	JPH07288248(A)	申请公布日期	1995.10.31
申请号	JP19940079094	申请日期	1994.04.19
申请人	TOSHIBA CORP	发明人	ISHITANI HIROSHI
分类号	C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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