| 摘要 |
PURPOSE:To check any damage to a work holding member in absorbing and easing the extent of impact force at a time when this impact force due to work has acted on the inner circumferential surface of a recess hole by holding the work holding member rockably on the other surface plate. CONSTITUTION:In a state that a work W is pressed to a polishing surface 3 of a lower surface plate 1, this lower surface plate 1 is rotated at a constant speed as feeding this polishing surface 3 with slurry inclusive of an abrasive. Then, an upper surface plate 2 is rocked on the lower surface plate 1 as freely rotation in response to a rotation of this lower surface plate 1, and thereby an underside of the work W is made uniformly in contact with the polishing surface 3 and uniformly polished. At this time, the work W collides with an angular part of a recess hole 7 by dint of torque to be received out of the polishing surface 3 of the lower surface plate 1 in time of polishing, but since a work holding member 6 is somewhat rockable to the upper surface plate 2, this member 6 is rocked to some extent in time of receiving the impact force and thus it absorbes and ease this impact force. |
