PRESSURE SENSOR HEAD AND ITS MANUFACTURE

摘要

PURPOSE:To provide a pressure sensor head which is adapted for mounting at the end of an optical fiber and which is so excellent in the isotropy of deflection (displacement) of a diaphragm due to pressure as to easily form a pressure sensor usable in living organisms, such as blood vessels, and capillaries. CONSTITUTION:A pressure sensor head has an integrated semiconductor substrate 1 having a machining-resistant layer 3 on one side, and an easy-to-machine layer 2 located on the other side of the substrate has a recessed portion of circular cross section consisting of a small diameter portion 22 and a large diameter portion 21, with the large diameter portion 21 located outside the small diameter portion 22 and open to the outer surface of the substrate 1 so as to be capable of accommodating an optical fiber end, and a method for manufacturing the pressure sensor head includes boring a hole, using ultrasonic machining method and/or fine discharge machining method, in the easy-to- machine layer 2 located on one side of the integrated semiconductor substrate 1 having the machining-resistant layer 3 on the other side. A pressure sensor can be easily and efficiently formed into a fine one which has a circular diaphragm surface as a part integrated with the semiconductor substrate and which is used for mounting an extra fine single optical fiber.