| 摘要 |
PURPOSE:To prevent any crack and chip in a work due to a deviation in the parallelism of an upper surface plate from occurring. CONSTITUTION:This is a lapping machine that holds a work W kept by a carrier 10 between both lower and upper surface plates 1 and 2 and this carrier 10 is rotated or revolved, whereby both sides of the work W aew polished. The upper surface plate 2 is possible to move up and down, and a shock absorber 20 making oil a buffer medium is attached to the peripheral part. In addition a roller 22 is installed in a tip of a rod 21 of this shock absorber 20, and this roller 22 comes into contact with a top face of an internal gear 4 in time of the upper surface plate 2 going down. |
