摘要 |
<p>PURPOSE:To provide a pressure sensor that can easily be formed into a supermicro one applicable to the inside of living organisms such as blood vessels, and capillaries. CONSTITUTION:A pressure sensor has a flexible reflecting film 1 at the end of an optical fiber 2 having a recess 21 at its end, and a method for manufacturing the pressure sensor includes boring a hole in the end of the optical fiber 2 using focused ion beam method and/or reactive ion etching method to form the recess 21, and joining the flexible reflecting film to the end of the optical fiber 2 The outside diameter of the pressure sensor can be made substantially equal to the diameter of the optical fiber 2 used, so that the pressure sensor can be formed into a supermicro photodetection type that is applicable in detecting the internal pressure of the hot balloon of a catheter endoscope.</p> |