发明名称 PRESSURE SENSOR AND ITS MANUFACTURE
摘要 <p>PURPOSE:To provide a pressure sensor that can easily be formed into a supermicro one applicable to the inside of living organisms such as blood vessels, and capillaries. CONSTITUTION:A pressure sensor has a flexible reflecting film 1 at the end of an optical fiber 2 having a recess 21 at its end, and a method for manufacturing the pressure sensor includes boring a hole in the end of the optical fiber 2 using focused ion beam method and/or reactive ion etching method to form the recess 21, and joining the flexible reflecting film to the end of the optical fiber 2 The outside diameter of the pressure sensor can be made substantially equal to the diameter of the optical fiber 2 used, so that the pressure sensor can be formed into a supermicro photodetection type that is applicable in detecting the internal pressure of the hot balloon of a catheter endoscope.</p>
申请公布号 JPH07286922(A) 申请公布日期 1995.10.31
申请号 JP19940104628 申请日期 1994.04.19
申请人 MITSUBISHI CABLE IND LTD 发明人 YAMAMOTO KEISUKE;TOYAMA OSAMU;KOBASHI SANENORI
分类号 G01L9/00;A61B5/0215;B81B3/00;B81C3/00;G02B6/00;H01L29/84;(IPC1-7):G01L9/00;A61B5/021 主分类号 G01L9/00
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