| 摘要 |
PURPOSE:To provide an X-ray analyzing method by which an unknown sample can be accurately analyzed without preparing a standard sample having a large diameter. CONSTITUTION:An electron beam is radiated to an electric current correcting sample 6c having a large diameter in a comparatively high degree of vacuum, and a signal IH obtained from the sample is obtained, and an electron beam is radiated to the electric current correcting sample 6c in a comparatively high degree of vacuum, and a signal IL obtained from the sample is obtained, and an electric current correcting factor K1 (=IL/IH) is found from the obtained two kinds of signals. The concentration of an unknown sample is analyzed from this electric current correcting factor K1, characteristic X-ray intensity I1 obtained by radiating an electron beam to a standard sample 6b in a comparatively high degree of vacuum and characteristic X-ray intensity I2 obtained by radiating an electron beam to an unknown sample 6a in a comparatively low degree of vacuum. |
