STATIC PRESSURE FLOATING STAGE

摘要

PURPOSE:To perform highly accurate processing by providing a slider with a magnet placed oppositely to the magnetic material of a guide and an air pad placed oppositely to the guiding surface of the guide. CONSTITUTION:A horizontal direction is noncontact floating by means of a balance between a static pressure applied on a floating space between a Y guide 18 and a Y air pad 19 and a magnetic force applied to the side wall of an L formed yoke 20 and a magnet 21b. Similarly, a vertical direction is noncontact floating by means of a balance between a static pressure applied on a floating space between a surface plate 16 and a Y slider 17 and a magnetic force applied to the bottom of the L formed yoke and a magnet 21a. That is, both shaft ends of the Y guide 18 are differently supported and thus the magnet 21a is adsorbed to the bottom of the L formed yoke 20 fixed to the Y guide 18 by means of a magnetic force. This force is applied to the surface of the surface plate 16 via a bridge 22 and balanced with a static pressure for floating the Y slider 17.