MULTIPLE THIN FILM TRANSISTOR ARRAY SUBSTRATE AND ITS INSPECTION METHOD

摘要

PURPOSE:To obtain the multiple thin film transistor(TFT) array substrate with short-circuiting wires and its inspection method which can inspect a short circuit between layers by simple conduction inspection after the TFT array substrate having plural TFTs arranged on one substrate is completed, and is small in the number of contact paints and can specify a short-circuiting surface. CONSTITUTION:The multiple TFT array substrate having the TFTs arranged on one substrate by (m) rows and (n) columns (m>1 and n>1) is provided with short-circuiting wires 41, 42, and 43 which electrically separate short- circuiting wires for the TFTs by address lines, data lines, and auxiliary capacity lines constituting the TFTs, and also connect the address lines, data lines, and auxiliary capacity lines by the rows, columns, and slanting diagonal units.