摘要 |
<p>PURPOSE:To prevent the discharge of moisture, etc., collected by a porous hollow-fiber filter membrane from a downstream port and to prevent the film membrane from be crushed. CONSTITUTION:This filter device consists of a filter main body 11 contg. a separation chamber 19 having an upstream port 18 and a downstream port 21 for a gas passage and provided with a drain mechanism for discharging a liq. in the chamber 19 and a flow control part 51 having an inlet port 55 connected to a gas pressure source, an outlet port 56 communicated with the port 55 and a feedback port 57 communicated with the downstream port 21, contg. a valve hole 60 and used to send the flow-controlled gas to the upstream port 18. Many porous hollow-fiber filter membranes 25 having micropores are furnished in the separation chamber 19 to remove the liq. contained in the gas. A valve member 61, which is actuated by the pressure difference between the inlet port 55 and the feedback port 57 to control the flow rate of the gas, is freely slidably provided in the valve hole 60.</p> |