| 摘要 |
PURPOSE:To obtain a soft magnetic thin film whose resistance is improved with maintaining a magnetic characteristic, by adding elements such as Cr and Nb to an Fe-C type magnetic material which develops a soft magnetic characteristic by heat treating, and controlling the addition concn. to control the crystallizing temp. CONSTITUTION:The crystallizing temp. of a fine crystal precipitation type soft magnetic film can be controlled by controlling the kind and concn. of added elements such as Cr, Nb and Al, because the added elements form intermetallic cpds. with elements such as Fe and Co or complex carbides. This suppresses the crystal growing reaction rate whereby a magnetic film having fine crystals can be stably obtained. As the result, a good and stable soft magnetic characteristic is obtained, a magnetic film having a high corrosion resistance is obtained since the alpha-Fe phase crystal grain size is small to provide fine crystals, and the reliability is improved.
|
