FILM FORMING APPARATUS,申请号JP19940079012-传众专利搜索

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发明名称	FILM FORMING APPARATUS
摘要
申请公布号	JPH07288233(A)	申请公布日期	1995.10.31
申请号	JP19940079012	申请日期	1994.04.18
申请人	CANON INC	发明人	AOIKE TATSUYUKI
分类号	C23C16/50;H01L21/205;H01L21/285;(IPC1-7):H01L21/205	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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