METHOD FOR CHECKING FILM THICKNESS OF IN-LINE COATER AND WAFER BOAT,申请号JP19940101902-传众专利搜索

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发明名称	METHOD FOR CHECKING FILM THICKNESS OF IN-LINE COATER AND WAFER BOAT
摘要
申请公布号	JPH07288225(A)	申请公布日期	1995.10.31
申请号	JP19940101902	申请日期	1994.04.15
申请人	SONY CORP	发明人	YAMANAKA KUNIKO
分类号	B05D1/40;B05C11/08;B05D3/00;H01L21/027;H01L21/66;(IPC1-7):H01L21/027	主分类号	B05D1/40
代理机构		代理人
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