发明名称 Method of treating particles
摘要 Particles (10) contained in a mass of liquid etchant (12) and being wetted and etched thereby are moved into a mass of an inert, etching-terminating liquid (14) which abuts the etchant mass by overcoming surface tension forces exerted on the particles by the etchant at the interface (16,70) of the liquid masses. A vortex (24) of the inert liquid (14) is forced and in turn forces a conformal vortex (60) of the etchant (12) with the particles (10) therein. Turbulence at the interface (70) of the vortices (24,60) and vortex-generated centrifugal force on the particles (10) overcome the surface tension forces, and the particles move into the inert liquid (14).
申请公布号 US5462639(A) 申请公布日期 1995.10.31
申请号 US19940181070 申请日期 1994.01.12
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 MATTHEWS, MARK D.;BROWN, LOUANNE K.
分类号 B01J8/14;B01J19/24;H01L31/18;(IPC1-7):B01D43/00 主分类号 B01J8/14
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