发明名称 |
Method of treating particles |
摘要 |
Particles (10) contained in a mass of liquid etchant (12) and being wetted and etched thereby are moved into a mass of an inert, etching-terminating liquid (14) which abuts the etchant mass by overcoming surface tension forces exerted on the particles by the etchant at the interface (16,70) of the liquid masses. A vortex (24) of the inert liquid (14) is forced and in turn forces a conformal vortex (60) of the etchant (12) with the particles (10) therein. Turbulence at the interface (70) of the vortices (24,60) and vortex-generated centrifugal force on the particles (10) overcome the surface tension forces, and the particles move into the inert liquid (14).
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申请公布号 |
US5462639(A) |
申请公布日期 |
1995.10.31 |
申请号 |
US19940181070 |
申请日期 |
1994.01.12 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
MATTHEWS, MARK D.;BROWN, LOUANNE K. |
分类号 |
B01J8/14;B01J19/24;H01L31/18;(IPC1-7):B01D43/00 |
主分类号 |
B01J8/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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