发明名称 COLLIMETER AND ITS PREPARATION
摘要 <p>A method for manufacturing a collimator comprising the steps of patterning a plurality of thin metal strips into a plurality of basic plates, and forming grooves or ridges on front and back surfaces of each basic plates. Thereafter, the thin strips are folded, mated, and welded together to form pillar cells within the collimator.</p>
申请公布号 JPH07286271(A) 申请公布日期 1995.10.31
申请号 JP19950010972 申请日期 1995.01.26
申请人 SAMSUNG ELECTRON CO LTD 发明人 RI MASAYOSHI;BOKU NOBUATSU;SAI KICHIGEN
分类号 C23C14/34;B21D47/04;G21K1/02;H01J37/34;H01L21/203;H01L21/265;H01L21/285;H01L21/74;(IPC1-7):C23C14/34 主分类号 C23C14/34
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