| 摘要 |
<p>PURPOSE:To prevent the change in graphics after operation by performing doughnut spreading for a mask pattern data used in a semiconductor integrated circuit having the hierarchical structure, providing graphics in close proximity to a cell boundary at both master and slave cells, performing geometrical operation, and correcting the values after the processing. CONSTITUTION:At first, a hard zone frame is set for all cells (a). Then, the processing for forming the spreading data such as doughnut spreading is performed for the upper cells for every cell from the bottom to the root cell (b). The results are sequentially recorded (c). Then, the spread data obtained for every cell are read from the bottom cell (cell A) to the root cell (cell B) (d). When the data are the ordinary data, the data are sent for the geometrical operation; and when the data the cut-zone-frame data, the data are sent for correcting operation (e). Then, the geometrical operation is performed for every cell (f). The correcting operation is performed on the obtained geiometrically operated data (g). The obtained processed data are outputted.</p> |
