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发明名称
WAFER CLEAVING JIG AND CLEAVING METHOD FOR WAFER
摘要
申请公布号
JPH07288241(A)
申请公布日期
1995.10.31
申请号
JP19940080126
申请日期
1994.04.19
申请人
NEC KANSAI LTD
发明人
ISONO KAORU
分类号
H01L21/301;(IPC1-7):H01L21/301
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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