发明名称 SEMICONDUCTOR LASER AND ITS MANUFACTURING METHOD
摘要 PURPOSE:To prevent a step cutoff in a current prevention layer of a semiconductor laser. CONSTITUTION:In this semiconductor laser and its manufacturing method, a surface of a compound semiconductor crystal 5 is coated with a mask to form grooves 8, 8 extending to a semiconductor substrate 2 by a first etching treatment. A groove 8 and an upper surface 4a of the compound semiconductor crystal 5 therebetween are coated to thinly form a surface of the compound semiconductor crystal 5 other than coated portions by a second etching process. Next, current block layers 10, 11 from the groove 8 to its outside further grow by a liquid phase epitaxial method.
申请公布号 JPH07288361(A) 申请公布日期 1995.10.31
申请号 JP19940078270 申请日期 1994.04.18
申请人 NEC KANSAI LTD 发明人 OOKUBO MITSUSUMI
分类号 H01S5/00;H01S5/22;H01S5/227;(IPC1-7):H01S3/18 主分类号 H01S5/00
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