| 摘要 |
PURPOSE:To provide an output adjusting method for piezoelectric type angular velocity sensor with suppressed offset noise and its manufacturing method. CONSTITUTION:The method is used for adjusting the output of a piezoelectric type angular velocity sensor 1 provided with a prismatic vibrating part 11. A first side face 111 of the part 11 is joined with a piezoelectric element 20 for vibration and a second side face 112 thereof is joined with a piezoelectric element 20 for detection respectively, and the element 20 is provided with a piezoelectric body 21 and an electrode 22. After the element 20 is joined with the part 11, the electrode 22 and body 21 are partly cut off so as to adjust the output of the element 20. Therefore the output of the sensor 1 can be adjusted. |
