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发明名称
IC CHIP MEASURING CIRCUIT
摘要
申请公布号
JPH07283279(A)
申请公布日期
1995.10.27
申请号
JP19940092976
申请日期
1994.04.05
申请人
SONY CORP
发明人
KATOU KIKUFUMI
分类号
G01R31/26;G01R31/28;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/26
代理机构
代理人
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地址
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