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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH07283310(A)
申请公布日期
1995.10.27
申请号
JP19940069825
申请日期
1994.04.07
申请人
SEIKO INSTR INC
发明人
AKINO MASARU
分类号
H01L21/3205;H01L21/768;(IPC1-7):H01L21/768;H01L21/320
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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