| 摘要 |
PURPOSE:To ensure high resolving power and to reduce the dependency of resolving power on film thickness by incorporating an alkali-soluble resin and 1,2-naphthoquinonediazido-5- (and/or -4-)sulfonic ester of a specified polyhydroxy compd. CONSTITUTION:An alkali-soluble resin and 1,2-naphthoquinonediazido-5(and/or -4-)sulfonic ester of a polyhydroxy compd. having a structure represented by the formula are incorporated. In the formula, each of R1-R3 is H, halogen, hydroxyl, alkyl or alkoxy and each of (m), (n) and (o) is an integer of 1-3. The alkali-soluble resin is, e.g. novolak resin, acetone-pyrogallol resin, polyhydroxystyrene or its deriv. and it is preferably novolak resin obtd. by bringing a prescribed monomer as a principal component into addition polymn. with aldehydes in the presence of an acidic catalyst. |
