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发明名称
EVACUATOR
摘要
申请公布号
JPH07279888(A)
申请公布日期
1995.10.27
申请号
JP19940069520
申请日期
1994.04.07
申请人
APPLIED MATERIALS INC
发明人
JINBO TAKESHI
分类号
F04D19/04;(IPC1-7):F04D19/04
主分类号
F04D19/04
代理机构
代理人
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