摘要 |
PURPOSE:To position a shaft, a vacuum and a suction port highly accurately by detecting the position of an IC to be measured through a laser differential displacement gauge carried on the arm of an IC handier and then designating a motor for Z direction control to turn a ball screw. CONSTITUTION:The pick and place system comprises a laser differential displacement gauge 1 carried on the arm 8 of an IC positioning handier, a ball screw 3 for Z direction drive, a motor 2 for Z direction control, a pulley 4, a shaft 5, a vacuum 6, and a suction port 7. An IC to be measured is positioned highly accurately in the height direction by means of the displacement gauge 1 which delivers an instruction to the motor 2 for turning the ball screw 3 through the pulley 4 thus positioning the shaft 5, the vacuum 6 and the suction port 7 highly accurately at designated positions. |