THIN FILM VAPOR GROWTH DEVICE,申请号JP19940087255-传众专利搜索

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发明名称	THIN FILM VAPOR GROWTH DEVICE
摘要
申请公布号	JPH07283149(A)	申请公布日期	1995.10.27
申请号	JP19940087255	申请日期	1994.04.04
申请人	NISSIN ELECTRIC CO LTD	发明人	KUBOTA KIYOSHI
分类号	C23C16/44;C23C16/455;H01L21/205;(IPC1-7):H01L21/205	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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