发明名称 OSCILLATOR FOR PIEZOELECTRIC ACTUATOR
摘要 PURPOSE:To raise the energy conversion efficiency by improving the fixation of a piezoelectric element on an elastomer for diminishing the absorption of oscillation by the bonding agent of an oscillator for the title piezoelectric actuator. CONSTITUTION:An oscillator piezoelectric actuator produced by bonding a piezoelectric element 1 on an elastomer 4 is composed by roughening the surface of the piezoelectric element 1 to the elastomer 4 for fixing them using a bonding agent. As for the surface roughening method, etching, plastic or polishing steps may be applicable.
申请公布号 JPH07283454(A) 申请公布日期 1995.10.27
申请号 JP19940069823 申请日期 1994.04.07
申请人 SEIKO INSTR INC 发明人 ITO HIRONOBU
分类号 B06B1/06;H01L21/304;H01L41/09;H01L41/22;H02N2/00 主分类号 B06B1/06
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