| 摘要 |
PURPOSE:To maintain a high working rate, to improve the working efficiency, to decrease the production of defective products, and to obtain a high yield by installing an in-line inspecting device and an extracting device of defective products at a specified position in this order and installing at least two devices adjacent to each other of a device to form a black matrix film, device to process a pattern and device to apply an overcoat. CONSTITUTION:This production device for a color filter includes a device to form a black matrix film, pattern processing device to process each pattern of three primary colors, and a device to apply an overcoat film. In-line inspecting devices 1c, 2b and extracting devices of defective products 1d, 2c are installed in this order at a specified position. Further, at least two of the device to form a black matrix film, pattern processing device, and device to apply an overcoat are successively installed. Further, a supply device 3 to supply a substrate to be treated which responses to the rejection of defective products and supplies a substrate to be treated in the successive stage is installed. |
