| 摘要 |
<p>PURPOSE:To provide a semiconductor manufacturing device management method and a system therefor capable of appropriately detecting the generation part of mechanical abnormality in a semiconductor manufacturing device and the contents of the abnormality in an early stage and giving an instruction to an operator. CONSTITUTION:A management computer manages the operation timing of the entire device from I/O data obtained from the various kinds of sensors or the like added to the semiconductor manufacturing device, performs comparison with a normal state, generates an alarm when the difference of the timing exceeds a management standard, transmits signals to a fault diagnostic expert system on a work station connected through a LAN, receives a diagnosis result from the fault diagnostic expert system and gives the instruction to the operator.</p> |
