| 摘要 |
PURPOSE:To make it possible to enable a high-efficiency and high-output CO gas laser to generate laser gas in an atmosphere at room temperature or thereabouts without adding Xe or Hg to the laser gas by a method wherein the wind velocity on a laser gas flow path is set on the basis of a gas temperature at the exit of a discharge part and the output of a high-frequency feeder means. CONSTITUTION:The so-called RF oscillator or the like is adopted to a high-frequency feeder means 4. A gas feed source 5 feeds laser gas, which is not added with Xe or Hg and has necessary components, such as laser gas having components of 16% of N2, 5% of CO2 and 0.2 to 0.4% of O2, with the remnant of He (a mole fraction). A fan 7 is arranged in such a way that it is connected with the means 4 and a gas temperature detection means 9 and controls the wind velocity of laser gas, which is inserted in a laser gas flow path 1. A temperature-sensing part of the means 9 measures a gas temperature at the exit of a discharge part 2 and the means 9 conducts an operation control of the fan 7 in connection with output of the means 4. |
