发明名称 FORMATION OF INTERCONNECTION ON MULTILAYER INTERCONNECTION BOARD
摘要 PURPOSE:To reduce the occurrence of disconnection by notching without making processes complicated and, at the same time, to minimize the increase of the capacity of a multilayer interconnection board caused by the increase of the wire width of wiring. CONSTITUTION:The wire width of upper-layer wiring 10 near step sections 5 and 5 at the intersection of multilayer interconnection is made thicker than that in the other places. The wire width of the wiring 10 at the other place is set to a fixed value which is thinner than that near the step sections 5 and 5. Therefore, the occurrence of disconnection is reduced even when wedge-like notches 7, 7,..., 7 are formed in the wiring 10, because the wire width is increased.
申请公布号 JPH07283315(A) 申请公布日期 1995.10.27
申请号 JP19940093037 申请日期 1994.04.05
申请人 SONY CORP 发明人 SARAI TAKAAKI
分类号 H01L27/146;H01L21/306;H01L21/768;H01L23/12;H01L23/522;H05K3/46;(IPC1-7):H01L21/768 主分类号 H01L27/146
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