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发明名称
EVALUATION SYSTEM FOR SEMICONDUCTOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH07280886(A)
申请公布日期
1995.10.27
申请号
JP19940101840
申请日期
1994.04.14
申请人
HITACHI LTD
发明人
SAKAI YUJI
分类号
G01R31/26;G01R31/28;H01L21/66;(IPC1-7):G01R31/28
主分类号
G01R31/26
代理机构
代理人
主权项
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