| 摘要 |
PURPOSE:To provide a highly safe heat treatment device and a method, wherein combustible processing gas can be protected against explosion even if it leaks out of a processing gas piping. CONSTITUTION:An oven 3 where a work is treated with combustible processing gas, an exhaust chamber 26 provided hermetically surrounding a part of the circumference of a processing gas piping which supplies processing gas to the oven 3, and an inert gas feed means 27 which forms an inert gas atmosphere feeding inert gas into the exhaust chamber 26 are provided. By this setup, even if combustible processing gas leaks out of the processing gas piping and others, it is collected in the exhaust chamber 2 filled with inert gas, so that it is never exploded. |
