发明名称 Optical refractive index gradient measuring method for e.g. dynamic IGBT behaviour
摘要 The method involves using an electrically driven sample (1) in a state where the carrier concentration and temperature are such that a varying refractive index is exhibited. The sample is provided with source (12), gate (13) and drain (14) electrodes. A monochromatic, e.g. infrared, laser beam cluster (3) is generated and directed at the sample. The beam cluster deviation w.r.t. time is measured and recorded.The beam is incident along axis (18) and the deviation of beam (17) w.r.t. the axis is measured. A quadrant diode measures the beam displacement using preamplifiers, impedance converters and difference amplifiers. A digital storage oscilloscope is used to capture the difference amplifier output in the period of interest.
申请公布号 DE19511473(A1) 申请公布日期 1995.10.26
申请号 DE19951011473 申请日期 1995.03.29
申请人 SIEMENS AG, 80333 MUENCHEN, DE 发明人 DEBOY, GERALD, DIPL.-PHYS., 82008 UNTERHACHING, DE;SOELKNER, GERALD, DR., 85521 OTTOBRUNN, DE;WOLFGANG, ECKHARD, DR., 81379 MUENCHEN, DE
分类号 G01N21/17;G01N21/45;H01L21/66;(IPC1-7):G01N21/41 主分类号 G01N21/17
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