| 摘要 |
<p>The present invention relates to a molecular pump having air suction grooves which have a rectangle-shaped section and typical protruded or inclined side-walls toward the rotary direction of the pump. Some single/basic air suction units concentrically mounted provide a multistage air suction unit composed in series or parallel connection. The single- and multi-stage units concentrically mounted with other molecular pump or rotary mechanical pump can form a compound vacuum pump with good operation performance, fast suction speed and high compression ratio.</p> |
