Behälter für flüssigen Rohstoff.

摘要

A liquid source container device (26) is used for a liquid gas source for a semiconductor manufacturing device. This container device (26) includes a main body (17) for containing a source liquid, to which a gas supply line (18) for transferring the source liquid (13), and a source liquid delivery line (19) for delivering the liquid (13) are connected. The gas supply line (18) has first and second gas supply valves (20 and 24) provided thereon, and the liquid delivery line (19) has first and second liquid delivery valves (21 and 25) also provided thereon. A section of the gas supply line (18) which locates between the first and second gas supply valves (20 and 24) and a section of the liquid delivery line (19) which locates between the first and second delivery valves (21 and 25) are connected with each other by means of a purge line (23) which has a purge valve (22) provided thereon. By operating the purge line, the purge valve, and the four valves, the efficiency of purge-drying procedures carried out before and after transferring the source liquid, is improved, and therefore the container device, as well as the semiconductor manufacturing device can be prevented from being contaminated.