Method for preparing a superconducting thin film of compound oxide.
摘要
<p>Method for preparing a superconducting thin film of compound oxide having improved properties on a substrate by laser evaporation technique. A target has a surface area which is smaller than an irradiation area of a spot of a laser beam used, so that whole surface of the surface is irradiated with the laser beam. <IMAGE></p>
申请公布号
EP0526331(B1)
申请公布日期
1995.10.25
申请号
EP19920402185
申请日期
1992.07.29
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD.
发明人
NAGAISHI, TATSUOKI, C/O ITAMI WORKS OF SUMITOMO;NAKANISHI, HIDENORI, C/O ITAMI WORKS OF SUMITOMO;TANAKA, SABURO, C/O ITAMI WORKS OF SUMITOMO;ITOZAKI, HIDEO, C/O ITAMI WORKS OF SUMITOMO
