Apparatus for loading and unloading reticles

摘要

A reticle loading and unloading apparatus includes a cassette 200 having a door 203 longer than a front-width of the cassette; a manipulator having a hand 310 for inserting a reticle 100 within the cassette or drawing it out; an opening and shutting portion 501 - 503 for opening and shutting the door; and a sensor 600 which senses whether or not a reticle is loaded within the cassette. Thus, the manipulator can insert the reticle within the cassette or draw it out after checking whether or not a reticle is loaded within the cassette to prevent collisions. The sensor may be a light receiving element or a weight sensor.