发明名称 Method for fabricating reverse-staggered thin-film transistor.
摘要 <p>A method for a thin-film transistor employed as a liquid crystal display includes the steps of selectively forming a gate electrode on a substrate, covering the gate electrode and the substrate with a gate insulating film, forming a semiconductor channel layer on the gate insulating film, forming on the channel layer a semiconductor contact layer of a first conductivity type having first, second and third portions, forming source and drain electrodes respectively on the first and second portions of the contact layer, removing the third portion of the contact layer to expose a part of the channel layer, and forming a semiconductor region of a second conductivity type at the part of the channel layer. &lt;IMAGE&gt;</p>
申请公布号 EP0678907(A2) 申请公布日期 1995.10.25
申请号 EP19950105936 申请日期 1995.04.20
申请人 NEC CORPORATION 发明人 KOIDE, SHIN, C/O NEC CORPORATION;OHI, SUSUMI C/O NEC CORPORATION
分类号 H01L21/336;(IPC1-7):H01L21/336 主分类号 H01L21/336
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