| 摘要 |
An air cleaning apparatus according to the present invention includes an apparatus body having a suction port through which air in a processing space is sucked and a discharge port through which the air sucked through the suction port is discharged into the processing space. A blower is provided in the apparatus body for sucking the air from the processing space into the apparatus body through the suction port and discharging the sucked air into the processing space through the discharge port. In addition an impurity gas removing device in the apparatus body is provided for removing impurity gases contained in the air sucked through the suction port and harmful to processing in the processing space, and a particle removing device is provided on the exhaust side of the impurity gas removing device for removing particles in the sucked air cleared of the impurity gases by impurity gas removing device.
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