| 摘要 |
<p>PURPOSE:To keep uniform the pressure distribution in an inner cup and the coating film of a material to be treated by dividing an evacuating pass of an outer cup into a buffer space of large capacity connecting to an evacuating device and a communicative space connecting it and a space in the inner cup. CONSTITUTION:After a chuck 10 in which a material to be treated is set on the upper surface is lowered and engaged with an inner cup 3, liquid is dropped onto the upper surface of the material to be treated, and also an outer cup 2 and the inner cup 3 are closed by cover bodies 26, 27 respectively. Because at this time, an evacuating pass 20 is normally evacuated, the inner cup 3 is also evacuated through a liquid discharge and evacuating hole 22. Since the liquid discharge and evacuating hole 22 is not opened to a buffer space S1 to which an evacuating hole 23 is opened but opened to a communicative space S2 of small volume, however, the inner cup 3 is uniformly evacuated, not influenced by the evacuating hole 23. After that, the inner cup 3 and the chuck 10 each are rotated to uniformly diffuse liquid by centrifugal force.</p> |
