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发明名称
摘要
申请公布号
JPH0744049(U)
申请公布日期
1995.10.24
申请号
JP19910028920U
申请日期
1991.04.24
申请人
发明人
分类号
B65G49/07;B65G47/90;H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
B65G49/07
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