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发明名称
Method and apparatus for treating bodies of semiconductor material
摘要
申请公布号
US3031363(A)
申请公布日期
1962.04.24
申请号
US19590842140
申请日期
1959.09.24
申请人
SYLVANIA ELECTRIC PRODUCTS INC.
发明人
SOPER RALPH B.
分类号
C23F1/00;H01L21/306
主分类号
C23F1/00
代理机构
代理人
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