发明名称 |
Inspection apparatus for detecting foreign matter on a surface to be inspected, and an exposure apparatus and a device manufacturing method using the same |
摘要 |
When inspecting the presence of foreign matter on a surface to be inspected by scanning the surface with a light beam from a light source utilizing a scanning system, and receiving scattered light from the surface by a detector, a correlation is utilized between a signal representing first scattered light obtained from the detector when the light beam scans a first line on the surface, and a signal representing second scattered light obtained from the detector when the light beam scans a second line displaced from the first line by a predetermined amount in a direction orthogonal to the direction of the first line.
|
申请公布号 |
US5461474(A) |
申请公布日期 |
1995.10.24 |
申请号 |
US19940266512 |
申请日期 |
1994.06.27 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
YOSHII, MINORU;NOSE, NORIYUKI;SUZUKI, MASAYUKI;MIYAZAKI, KYOICHI;TSUJI, TOSHIHIKO;TAKEUCHI, SEIJI |
分类号 |
G01N21/88;G01N21/94;G01N21/956;H01L21/66;(IPC1-7):G01N21/88 |
主分类号 |
G01N21/88 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|