| 摘要 |
PURPOSE:To enable movement having fine pitches, and to enable precise positioning by repeatedly transmitting a driving signal having a first waveform section, in which driving voltage is changed gently, and a second waveform section, in which driving voltage is changed suddenly, over an electro-mechanical transducer. CONSTITUTION:Projecting sections 11b, 11c are formed and piezoelectric elements 12, 13 on the reverse side are mounted to an elastic body 11, and piezoelectric elements 14, 15 are installed between the projecting sections 11b, 11c. A driver circuit is composed of a controller 21, a second waveform generator 22, a phase meter 23, a first waveform generator 24 and a polarity inversion equipment 25, a displacement detector 26, etc. The controller 21 drives the second waveform generator 22 on the first waveform generator 24 to switch between coarse and fine adjustments, and the number of cycles of applied voltage is controlled on the basis of the displacement, etc., of a relative displacement member 16 detected by the displacement detector 26. Accordingly, the high accuracy of positioning can be realized. |
