SUCTION HEAD OF DAM FRAME FOR SEALING

摘要

PURPOSE:To provide a suction head of dam frame for sealing by which the dam frame for sealing of a chip can be sucked to a fixed position. CONSTITUTION:The suction head of dam frame for sealing is provided, annularly at an interval in the suction face 1 with a large number of suction holes 2 for sucking the dam frame for sealing. The suction holes 2 are made through the bottom face of a series of annular grooves 3 each having a suction face la flush, at the corner of the annular grooves 3, with the bottom face of the annular groove 3.