发明名称 ON-OFF VALVE MOUNTING STRUCTURE
摘要 To secure an on-off valve mounting structure reduced in a setup space required for mounting a flow control valve. ! This mounting structure of an on-off valve is made up of being clamped to an output manifold 12 by an output valve 3 to be equipped with a valve supply port receiving a supply of gas in and around the central part of an underside, and a valve output port being interconnected or interrupted to or from the valve supply port by means of valve opening or closing, and a mounting bolt 41 being mounted with the on-off valve on the top face where the output valve 3 is mounted, is extended in the one side face direction, using two bolt holes formed on the top face extended. With this constitution, it has an output valve block 13 formed with an interconnecting passage interconnecting a manifold port 12b and the valve output port, and whereby the manifold port 12b is made up in an interval between both the mounting bolts 41 and 41. ! (C)1995,JPO
申请公布号 JPH07269732(A) 申请公布日期 1995.10.20
申请号 JP19940284061 申请日期 1994.10.24
申请人 CKD CORP;TOSHIBA CORP 发明人 MIKATA YUICHI;SUDO YOSHIHISA;GOSHIMA KENICHI;BANDOU HIROSHI;KOJIMA AKIHIRO
分类号 F16K27/00;C23F1/08;H01L21/302;H01L21/3065;(IPC1-7):F16K27/00 主分类号 F16K27/00
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